Vacuum pumps
Regularly vacuum system requires a set of vacuum pumps in order to reach HV or UHV. Pumping process starts with a mechanical pump. THis is followed by turbo pump.
Pumps
Mechanical pump SH-110, Dry scroll pump
Turbo pump: Varian TV 81- M pump (2008) MODEL: EX9698903
monitor : TURBO-V81-AG (Rack controller)
Pressure measurer: EYESYS mini-img (07/08)
Ion pump VacIon 8 (Lab C)
Ion pumps
Reasonable ion pumps.
| Controller | 1000 | |
| 55L pump | 280 |
Turbo pump
Agilent TWIS-Torr-84FS Some agilent pumps require constant operation.
Pfeiffer D-35614 Asslar model TMH 260. For this pump exists bearing replacement kit. Specifically for our model we have to change lubricant reservoir once a year, see p. 11 of the manual. To change bearings there are descriptions how to do it step-by-step for TPH 170(TPU 170).
Diffusion pump
In the bottom of a pump a heater is placed, which brings used fluid to boil. Usually an oil is used, its vapour raises along the cone in the center of the pump, the nozzles direct oil in downward direction. As it raises to the top it can trap air molecules(atoms), which are entering from
Titanium sublimation pump
Titanium Sublimation Pumps (TSPs) are often used in combination with ion pumps or independently to remove reactive gases from the vacuum environment. Combined with an Ion pump, the TSP allows for low ultimate pressure in a shorter amount of time. All TSP components are bakeable to 400°C. one of available pumps from Kurt J Lesker.
